| 摘要 |
<p>PURPOSE: A tilt transfer system of a substrate, a tilt transfer method, and a tilt transfer direction changing apparatus are provided to efficiently process the substrate by changing a transfer direction from a tilted direction to an orthogonal direction. CONSTITUTION: A first substrate transferring unit(1000) transfers a tilted substrate in a first transfer direction. A tilted transfer direction changing unit(2000) transfers the tilted substrate by changing the tilted direction of the substrate in a second transfer direction perpendicular to the first transfer direction by tilting the edge of the substrate transferred from the first substrate transferring unit. A second substrate transfer unit(3000) transfers the substrate transferred from the tilt transfer direction changing unit in the second transfer direction.</p> |
