| 摘要 |
PURPOSE: An apparatus for inspecting substrate secures the adsorption flow nature of substrate. The adsorption and the stable completeness check of substrate are proceed. CONSTITUTION: A substrate holder comprises the vacuum line having a plurality of vacuum ports(202). The substrate holder comprises the frame accomplishing the outer frame. The vacuum port is flown according to the adsorption angle of substrate. The vacuum port comprises the housing(240) in which the touch pad(232) touched with substrate, and the groove of the hemi spherical type and the joint(238) combined in the touch pad are formed. The o-ring locates in the housing, the joint and interval.
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