摘要 |
PURPOSE: According to the manufacturing method of capacitor and capacitor is need the metal layer of the laminating structure, it compositionally interlinks. The various capacitance is embodied. CONSTITUTION: A second insulation layer(112) is formed on the first insulation layer(100). The first metal layer(114) is formed in the trench of the second insulation layer. The 3rd insulation layer is formed on the second insulation layer, and the first metal layer. The first dielectric layer is formed in the trench of said 3rd insulation layer. The fourth insulating layer is formed on said 3rd insulation layer, and the first dielectric layer. The second metal layer is formed in the trench of the fourth insulating layer.
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