| 摘要 |
PURPOSE: An apparatus and a method for inspecting a semiconductor device are provided to improve the accuracy and speed of analysis by automatically searching for a cell with a defect. CONSTITUTION: A memory device to be inspected is loaded on a stage(20). A stage moving unit(30) moves the stage in response to a control signal. A controller(10) receives a defective address of a defect point in the semiconductor device from the outside. The controller calculates the moving distance according to a start address and the defective address and generates a control signal based on the calculated result.
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