| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an abrasive cloth improving polishing quality by improving haze. <P>SOLUTION: The abrasive cloth 1 is provided with: a base material layer 2; and a nap layer 3 which is a porous polishing layer formed on the base material layer 2. After wet freezing is performed by applying resin liquid to a surface of the base material layer 2, a difference between the maximum and minimum of a surface roughness Ra of the nap layer 3 as an abrasive layer formed by polishing a surface of the wet solidified resin is 1 μm or less. <P>COPYRIGHT: (C)2010,JPO&INPIT |
