| 摘要 |
PURPOSE: A unit ventilation monitoring system is provided to prevent CD(Critical Dimension) even/odd due to ventilation changes during a bake process, thereby improving yield and reliability of the bake process. CONSTITUTION: A unit ventilation concentration is measured. The measured unit ventilation concentration is compared with the specified ventilation range. An alarm signal is transmitted to a controller according to the comparison result. The alarm signal generated by the controller is transmitted to a driving arm so that the driving arm is stopped.
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