发明名称 METHOD OF DAMPING OBJECT, ACTIVE DAMPING SYSTEM, AND LITHOGRAPHIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of damping an object in motion at two or greater of degrees of freedom. <P>SOLUTION: In the method, positional quantities are measured at each of two or more of the positions of measurements, measurement signals are extracted at every dynamic mode from the measured positional quantities and controller units connected to each corresponding dynamic mode are supplied with the measurement signals in one dynamic mode. In the method, output signals are provided at every dynamic mode on the basis of each measurement signal, to which the controller units correspond, and control signals are provided to each of two or of actuators. In the method, the control signals at every actuator are based on output signals from one or two or more of the controller units. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010153854(A) 申请公布日期 2010.07.08
申请号 JP20090279995 申请日期 2009.12.10
申请人 ASML NETHERLANDS BV 发明人 BUTLER HANS;VAN DER WIJST MARC WILHELMUS MARIA
分类号 H01L21/027;H01L21/68 主分类号 H01L21/027
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