| 摘要 |
<P>PROBLEM TO BE SOLVED: To ventilate an inside of a pellicle without complicating the pellicle structure and furthermore requiring an accurate operating mechanism. <P>SOLUTION: A photomask storage device 100 with a pellicle stores the photomask with the pellicle with an internal space of the pellicle composed to communicate with the outside through an atmosphere pressure adjustment hole, and comprises a temperature-change imparting part 100a capable of imparting the temperature change to the photomask with the pellicle. Imparting the temperature change to the photomask with the pellicle ventilates the atmosphere in the pellicle through the atmosphere pressure adjustment hole. <P>COPYRIGHT: (C)2010,JPO&INPIT |
