| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a polishing rate while preferably maintaining a roll of an object to be polished. <P>SOLUTION: A polishing cloth includes a base layer 2 and a porous polishing layer 3 formed on the base layer 2. The specific surface area of the polishing layer 3 is 0.5-1.0 m<SP>2</SP>/g. This makes the surface of the polishing layer appropriately rough so that abrasive grains are readily attached to the surface, thereby improving the polishing rate while preferably maintaining the roll of the polished object, and shortening a time period required for starting up auxiliary polishing. <P>COPYRIGHT: (C)2010,JPO&INPIT |
