| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding wheel which can reduce the frequency of dressing of the grinding stones and does not produce scratches on a wafer. SOLUTION: This grinding wheel is detachably attached to the wheel mount of a grinding device having a spindle which is rotatably driven and the wheel mount connected to the end of the spindle. The grinding wheel includes an annular base having a mount installation part attached to the wheel mount and the plurality of grinding stones disposed in a ring shape at the free end of the annular base. The annular base is formed of a material which prevents grinding chips from adhering thereto. COPYRIGHT: (C)2010,JPO&INPIT
|
