| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for temperature measurement supporting the load of a board-like body without imposing a load on a sensor line, enabling a probe head to follow and adhere, while changing an angle (moving relatively rotationally) smoothly by receiving the weight of the board-like body, not requiring at all a load on the sensor line during rotational movement, using a thinner and more-sensitive sensor line, further minimizing heat escape from a probe head, and performing temperature measurement more accurately. SOLUTION: As a support structure for providing the probe head 3 on the tip part side of a probe body 4, an approximately spherical support 5 is interposed between both articles, and the probe head 3 is supported so as to change an angle (move relatively rotationally) smoothly without imposing a load on inside temperature sensor lines 21, 22 relative to the probe body 4, in correspondence with deflection or inclination of the board-like body W. COPYRIGHT: (C)2010,JPO&INPIT
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