| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify a manufacturing process, by providing a structure capable of improving measuring accuracy, in an optical interference type vibration sensor of a structure having an optical fiber for forming a half mirror film on the tip and a vibrator part for forming a total reflection film on the side opposed to the half mirror film. Ž<P>SOLUTION: A total reflection mirror film 5 is formed on a surface, by manufacturing the vibrator part 6 by forming a plurality of slits arranged in a position having a specific distance from a peripheral edge part from a position having a specific distance from a central part on a silicon substrate. A support part is arranged on the opposite side of the total reflection mirror film 5 of the vibrator part 6. The optical fiber 1 is inserted into an optical fiber insertion hole 2 of a ferrule 3, and an inserted side end surface is made to coincide with an end surface of the ferrule 3, and the half mirror film 4 is formed on the whole end surface of the ferrule 3, and a spacer 8 is inserted for securing an interval between the total reflection mirror film 5 and the half mirror film. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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