TABLET AND MAXIMUM STREAM FLOW PROVISION EQUIPMENT USING MASS STORE-TANK OF CHEMICAL SOLUTION OR LIQUID GAS

摘要

PURPOSE: An apparatus for refining and supplying large flux with a chemical solution or a liquid gas mass storage tank is provided to refine the liquid gas or the chemical solution to liquid gas or the chemical solution of high purity with a control part. CONSTITUTION: An apparatus for refining and supplying large flux with a chemical solution or a liquid gas mass storage tank includes the following: a storage tank(50) in which a coil pipe(40) is formed according to inner circumference and stores the liquid gas or the chemical solution; a reservoir(10) storing high temperature/low temperature heat medium and is connected to a pipe of the coil pipe; a recovery tank(20) transferring the heat medium to the reservoir; and a control part(30) controlling each device according to the inputted data.