| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical tomographic imaging apparatus and the like which is configured such that, in capturing the tomographic image of an object to be inspected, an incidence state represented by the incidence position and angle of a measurement light group to the object to be inspected can be observed, the measurement light group is imaged in a predetermined position of the object to be inspected, and the tomographic image is obtained at high speed. <P>SOLUTION: In the optical tomographic imaging apparatus, a plurality of light beams emitted from a light source and divided or a plurality of light beams emitted from a plurality of light sources are divided into a measurement light group and a reference light group, the measurement light group is guided to the object to be inspected and the reference light group is guided to a reference mirror, and the tomographic image of the object to be inspected is captured using a return light group by the measurement light group reflected or scattered by the object to be inspected and the reference light group reflected by the reference mirror. The optical tomographic imaging apparatus includes an observing means for capturing the observed image of the object to be inspected. An incident state represented by the incidence position and angle of the measurement light group to the object to be inspected can be observed by the observing means. <P>COPYRIGHT: (C)2010,JPO&INPIT |
