| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a micropattern which reduces thinning and dispersion in pattern shapes. SOLUTION: A transfer layer pattern 3 is formed by pressing a mold; then, a patterned film 4 is formed on the transfer layer pattern 3; and thereafter, the transfer layer pattern 3 is removed, and etching is performed from the association interface (indicated by a dotted line) at the formation of the patterned film 4 to etch the patterned film 4 into a final pattern 7. COPYRIGHT: (C)2010,JPO&INPIT |
