| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum pressure control system capable of improving pressure control responsiveness. Ž<P>SOLUTION: In the vacuum pressure control system configured to adjust the opening of a vacuum proportional on-off valve 16 to feedback control a vacuum pressure in a reaction chamber 10 to a target pressure, a preload pressure value (a leak starting position of an O-ring 49) is calculated from the vacuum pressure in the reaction chamber 10 or the vacuum target pressure, and the preload pressure value is taken as a lower limit value of the feedback control. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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