| 摘要 |
PURPOSE: A liquid chemical applying apparatus for a large size substrate is provided to prevent the agglomeration phenomenon amount adjacent liquid chemical particles, and to improve the coating uniformity and the reliability of the apparatus. CONSTITUTION: A liquid chemical applying apparatus for a large size substrate comprises the following: a first plate(10) and a second plate(20) facing each other, and including a buffer space at the combining portion for a liquid chemical; and a slit member(30) located at the end of both first and second plates to define the coating interval of the liquid chemical as the constant interval. The slit member includes a partition wall(31) installed in the vertical direction to divide the coating interval of the liquid chemical into the constant interval. |
