LINEAR MOTOR, STAGE SYSTEM, ALIGNER, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a linear motor that reduces a thrust fluctuation component without increase in cost. SOLUTION: The linear motor includes: a coil unit having multiple coil bodies 63 arranged in a first direction; and a magnetization unit having multiple magnetizing bodies. The coil unit and the magnetization unit are moved relative to each other. Each coil includes a skewed portion 70a formed at a predetermined skew angle to a second direction intersecting with the first direction. COPYRIGHT: (C)2010,JPO&INPIT