发明名称 Technik zur Herstellung einer Passivierungsschicht ohne ein Abschlussmetall
摘要 By determining at least one surface characteristic of a passivation layer stack used for forming a bump structure, the situation after the deposition and patterning of a terminal metal layer stack may be “simulated,” thereby providing the potential for using well-established bump manufacturing techniques while nevertheless significantly reducing process complexity by omitting the deposition and patterning of the terminal metal layer stack.
申请公布号 DE102006051490(B4) 申请公布日期 2010.07.08
申请号 DE20061051490 申请日期 2006.10.31
申请人 ADVANCED MICRO DEVICES INC. 发明人 LETZ, TOBIAS;LEHR, MATTHIAS;HOHAGE, JOERG;KUECHENMEISTER, FRANK
分类号 H01L21/283;H01L21/314;H01L21/60;H01L21/768 主分类号 H01L21/283
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