| 摘要 |
PROBLEM TO BE SOLVED: To provide a tool and a method for holding a substrate capable of easily separating the substrate. SOLUTION: A substrate holder holds a W substrate by vacuum suction. The substrate holder includes a substrate holding stage 1 having a sucking surface for the substrate W and fluid passages 14 and 23 selectively coupled with a vacuum source and a fluid supply source. The sucking surface of the substrate holder has a plurality of closed sections 12 surrounded by protrusions 6a, 6b and 6c. The fluid passages 14 and 23 have a plurality of communication paths 14 and 23b respectively independently communicating with the closed sections 12. COPYRIGHT: (C)2010,JPO&INPIT |
