| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination apparatus by which illumination light of uniform intensity distribution can be acquired. SOLUTION: The illumination apparatus includes a light source device for emitting light having an asymmetric intensity distribution and a polarization conversion element 21 for aligning polarization states of the light emitted from the light source device. The polarization conversion element 21 includes a splitting section 211 for splitting incident light L1 input from the light source device into transmitted light and reflected light having the polarization states different from each other in the Y-direction in which an intensity distribution of the incident light is asymmetric, and a conversion section for converting the polarization state of one of the transmitted light and the reflected light into the polarization state of the other of the transmitted light and the reflected light. A mirror system is composed including the splitting section 211, which emits the other light and the one light from the polarization conversion element 21 in roughly the same direction. The mirror system is disposed such that the direction in which the intensity distribution is asymmetric in the one light emitted from the polarization conversion element 21 is reversed to the direction in which the intensity distribution is asymmetric in the other light emitted from the polarization conversion element 21. COPYRIGHT: (C)2010,JPO&INPIT
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