发明名称 Robust TSV structure
摘要 A die includes a seal-ring structure below a substrate. The seal-ring structure is disposed around at least one substrate region. At least one means for substantially preventing ion diffusion into the substrate region. The at least one means is coupled with the seal-ring structure.
申请公布号 US2010171203(A1) 申请公布日期 2010.07.08
申请号 US20090349901 申请日期 2009.01.07
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY 发明人 CHEN HSIEN-WEI;JENG SHIN-PUU;TU HUNG-JUNG;CHIOU WEN-CHIH
分类号 H01L25/065;H01L23/48 主分类号 H01L25/065
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