DEVICE AND METHOD FOR MEASUREMENT MULTI-DEGREE OF FREEDOM MOVEMENT

摘要

PURPOSE: A device and a method for measurement multi-degree of freedom movement are provided to reduce manufacturing costs by detecting the position of a target on a plane through a single grating pattern. CONSTITUTION: A diagonal division grating pattern is arranged on a fixing unit and a plurality of unit lattices are formed on the diagonal division grating pattern. A movable unit(200) is linearly moved and rotated on the fixing unit, and the height of the movable unit is controlled on the fixing unit. An optical unit(300) receives a laser beam from the diagonal division grating pattern and detects the position of the movable unit. An auxiliary optical unit(400) projects a laser beam on the diagonal division grating pattern and receives the reflected beam from the diagonal division grating pattern to detect the height difference between the fixing unit and the movable unit.