| 摘要 |
PURPOSE: An equivalent model of MIM is provided to extract an accurate model and a parameter by extracting and inducing equivalent components from measured data. CONSTITUTION: A first wiring is formed by connecting a first parasitic inductance(8) and a first capacitor(12) in series to first resistor(10). A second wiring is connected in series to the first wiring and is formed by being connected in series to a second resistor and a second parasitic capacitance. A third wiring is connected in parallel with a sub capacitor and a sub resistor and is formed by connecting the sub capacitor and the sub resistor in series to the second capacitor. The third wiring is connected to a contact point between the first capacitor and the second resistor.
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