| 摘要 |
PURPOSE: A device for connecting gas lines in a semiconductor apparatus is provided to improve the life span of an element by allowing a gas line to be mounted/demounted with a hand instead of tool. CONSTITUTION: A gas inlet is installed in one side of a tube. A flexible line(200) is connected to an injector supplying a process gas to the gas inlet. A connecting part(300) is combined with flexible line without additional coupling apparatus. The connecting part comprises an insertion part(130), an o-ring(150), a joint(310), and a nut(330). The insertion part is extended from the end of the screw of the injector port to the same axis. The o-ring is installed to the outer circumference of the insertion part.
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