| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce deterioration in piezoelectric characteristics of a piezoelectric layer by reducing residual stress of the piezoelectric layer. <P>SOLUTION: First, a vibrating plate 40 is formed by forming a recessed portion 47a in a metal plate 47 made of stainless steel and arranging a metal layer 48 made of zinc in the recessed portion 47a. Then, a diffusion prevention layer 41 is formed on the upper surface of the metal plate 48 of the vibrating plate 40 and after a lower electrode 42 is further formed, particles of a piezoelectric material are deposited by an AD method on the upper surface of the diffusion prevention layer 41 where the lower electrode 42 is formed to form the piezoelectric layer 43. Then the vibrating plate 40, diffusion prevention layer 41, lower electrode 42 and piezoelectric layer 43 are heated to a predetermined temperature higher than the fusion point of the metal layer 48 to perform a heat treatment on the piezoelectric layer 43. Then the metal layer 48 is fused in the recessed portion 47a of the metal plate 47 to be in liquid phase. After an annealing processing process, the vibrating plate 40, diffusion prevention layer 41, lower electrode 42, and piezoelectric layer 43 are naturally cooled down to a temperature before the annealing processing process. <P>COPYRIGHT: (C)2010,JPO&INPIT |
