| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration detection element for detecting acceleration having a plurality of directions, and improving detection accuracy. <P>SOLUTION: The acceleration detection element includes: a piezoelectric substrate 1; a first acoustic wave element constituted of a first transmission electrode and a first reception electrode, and arranged on one main surface 3 of the piezoelectric substrate 1, for detecting a frequency change following application of an acceleration of a first surface acoustic wave propagating on one main surface 3 of the piezoelectric substrate 1 along a first virtual straight line; and a second acoustic wave element constituted of a second transmission electrode and a second reception electrode, and arranged on one main surface 3 of the piezoelectric substrate 1, for detecting a frequency change following application of an acceleration of a second surface acoustic wave propagating on one main surface 3 of the piezoelectric substrate 1 along a second virtual straight line 6 intersecting the first virtual straight line 5 in a plan view. <P>COPYRIGHT: (C)2010,JPO&INPIT |
