FREQUENCY ESTIMATION METHOD, FREQUENCY ESTIMATING DEVICE, SURFACE SHAPE MEASUREMENT METHOD, AND SURFACE SHAPE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a frequency estimation method for shortening a processing time while being low in calculation load, and to provide a frequency estimation device, a surface shape measurement method, and a surface shape measurement device. SOLUTION: The frequency estimation method for estimating frequencies in cyclic observed data such as an interference stripe and electric signals includes: a step for obtaining data; a step for adapting a sine wave function of assumed optional frequencies as model signals to the observed data; a step for obtaining a shift amount of a partial phase of the observed data and the model signals; and a step for calculating the frequencies of the observed data on the basis of the frequencies of the model signals and phase inclination concerning the shift amount of the phase. COPYRIGHT: (C)2010,JPO&INPIT