发明名称 PARTICLE TRAP
摘要 An apparatus and method for trapping particles in a housing is disclosed. A high voltage terminal/ structure is situated within a housing. A conductive material, having a plurality of holes, such as a mesh, is disposed a distance away from an interior surface of the housing, such as the floor of the housing, forming a particle trap. The conductive mesh is biased so that the electrical field within the trap is either non-existent or pushing toward the floor, so as to retain particles within the trap. Additionally, a particle mover, such as a fan or mechanical vibration device, can be used to urge particles into the openings in the mesh. Furthermore, a conditioning phase may be used prior to operating the high voltage terminal, whereby a voltage is applied to the conductive mesh so as to attract particles toward the particle trap.
申请公布号 WO2009076155(A3) 申请公布日期 2010.07.08
申请号 WO2008US85497 申请日期 2008.12.04
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.;KRAUSE, STEPHEN, E.;LOW, RUSELL, J.;TEKLETSADIK, KASEGN, D. 发明人 KRAUSE, STEPHEN, E.;LOW, RUSELL, J.;TEKLETSADIK, KASEGN, D.
分类号 H01L21/00;H01L21/02;H01L21/265 主分类号 H01L21/00
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