| 摘要 |
PURPOSE: An electrostatic chuck assembly is provided to prevent the arcing of a lift pin by concealing the lift pin from the penetration hole of an electrostatic chuck. CONSTITUTION: An electrostatic chuck(110) has a plurality of penetration holes. A lift pin(120) is inserted into the penetration hole of the electrostatic chuck. A pin rotating part(130) rotates the lift pin at the designated angle in order to conceal the lift pin from the penetration hole of the electrostatic chuck. A pin rotating part comprises a plate, a rotary shaft, and a motor. The plate supports the lift pin. The rotary shaft rotates the plate. The motor drives the rotary shaft.
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