Angular velocity sensor and method of fabrication thereof

摘要

The present invention provides an angular velocity sensor and a method of fabrication thereof. The angular velocity sensor comprises: a tuning-fork-type crystal element having a drive electrode for exciting a tuning-fork vibration and a sensor electrode for detecting an electrical charge in response to an angular velocity; an independent pedestal for affixing a main surface of a tuning-fork base portion of the crystal element to form an integrated unit; a main package for surface mounting, in which the crystal element is hermetically sealed and which has a cavity with an inner base surface to which the pedestal is affixed; and an IC having an oscillation circuit for driving the crystal element and a signal processing circuit for producing an angular velocity detection signal, and which is disposed either inside or outside the package. The pedestal has a weight and/or shape that ensures that the center of gravity of the crystal element moves towards the base portion side, maintaining the horizontal alignment of the crystal element.