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发明名称
NON-INTRUSIVE PLASMA MONITORING SYSTEM FOR ARC DETECTION AND PREVENTION FOR BLANKET CVD FILMS
摘要
申请公布号
KR100967473(B1)
申请公布日期
2010.07.07
申请号
KR20087006984
申请日期
2006.08.16
申请人
发明人
分类号
H01J37/32;C23C16/00;H05H1/24
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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