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发明名称
摘要
申请公布号	JP4497908(B2)	申请公布日期	2010.07.07
申请号	JP20030415891	申请日期	2003.12.15
申请人		发明人
分类号	H01L21/027;G03B27/52;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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