| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To securely hold and fix a pellicle in a stable state to a tray by an extremely easy work. Ž<P>SOLUTION: The outside of the outer edge of a protective film 5 for a large size pellicle A is provided with a protruding press margin 5a having a specified dimension. When the large size pellicle A is mounted on a tray 6 of the pellicle housing case B, the press margin 5a is adhered and fixed with a pressure-sensitive adhesive tape 9 to the surface of the tray 6. Ž<P>COPYRIGHT: (C)2005,JPO&NCIPI Ž</p> |
