METHOD FOR SETTING AN OPERATING PARAMETER OF A PARTICLE BEAM DEVICE AND A SAMPLE HOLDER FOR PERFORMING THE METHOD.,申请号NL20101037610-传众专利搜索

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发明名称	METHOD FOR SETTING AN OPERATING PARAMETER OF A PARTICLE BEAM DEVICE AND A SAMPLE HOLDER FOR PERFORMING THE METHOD.
摘要
申请公布号	NL1037610(A)	申请公布日期	2010.07.07
申请号	NL20101037610	申请日期	2010.01.05
申请人	CARL ZEISS NTS GMBH,	发明人	NIEBEL, HARALD;PAVIA, GIUSEPPE;STEGMANN, HEIKO;SCHILLINGER, RICHARD
分类号	H01J37/20	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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