发明名称 |
Method of wafer level transient sensing, threshold comparison and arc flag generation/deactivation |
摘要 |
A method for processing a semiconductor wafer in a plasma reactor comprises sensing transient voltages or currents on a conductor coupled to the wafer and providing a first comparator for comparing the transient voltages or currents with a threshold level stored in the comparator. The method further includes transmitting from the comparator an arc flag signal whenever a transient voltage or current is sensed that exceeds the threshold level, and deactivating the power generator in response to the arc flag signal.
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申请公布号 |
US7750645(B2) |
申请公布日期 |
2010.07.06 |
申请号 |
US20070893390 |
申请日期 |
2007.08.15 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PIPITONE JOHN;NUNN-GAGE RYAN |
分类号 |
H01H9/50;C23C14/34 |
主分类号 |
H01H9/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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