PROBE DEVICE AND METHOD OF CONTROLLING THE SAME

摘要

A probe unit comprising a cantilever having a probe being arranged oppositely to the surface of a sample, and means for measuring the sample while switching between two operation modes, i.e. a tapping mode for measuring the surface structure of the sample by oscillating the cantilever and a point contact mode for measuring the electric characteristics of the sample by touching the probe to the sample, at a specified interval.