| 摘要 |
PURPOSE: A multiple coating method is provided to improve thermal resistance, abrasion resistance, and hardness. CONSTITUTION: A multiple coating method comprises: a step of depositing ionized Ti particle on the surface of a basic material(1) connected to an cathode; a step of supplying Ti particle and coating TiN film(3) on the Ti film surface; a step of supplying Ti particle and Al particle on the surface of TiN film to coat AlTiN film(5); and a step of supplying ionized Ti particle, Al particle, and Si particle and coating AlTiSiN film(6) on the surface of AlTiN film. |
