METHOD FOR PROCESSING OPTICAL PROXIMITY CORRECTION

摘要

PURPOSE: A method for processing optical proximity correction is provided to increase the accuracy of optical proximity effect correction by reflecting variables changed by freezing and performing modeling for optical proximity correction. CONSTITUTION: A variable is extracted through a first photo process using a mask designed in advance(S210). First modeling is performed using variables extracted through a first photo process(S220). The variable is extracted through a freezing process(S230). Second modeling is performed using variables extracted through the freezing process. The variable is extracted through a second photo process using the designed mask(S250).