| 摘要 |
<p>PURPOSE: An exposure method using an exposure apparatus is provided to prevent the temperature rise of a focus lens by dividing the focus lens into multiple equal sections and rotating an aperture. CONSTITUTION: A lens is equally divided into multiple domains. An exposure process is performed by rotating an aperture to transmit light on each region. The aperture is a dipole aperture. In the dipole aperture, a light-transmitting part is formed to be symmetrical to each other. According to the angle of the light-transmitting part of the aperture, the rotation angle of the aperture is changed.</p> |
