发明名称 Forming a thin transistor with a redundant source of drain electrode
摘要 An object is to obtain a semiconductor device with improved characteristics by reducing contact resistance of a semiconductor film with electrodes or wirings, and improving coverage of the semiconductor film and the electrodes or wirings. The present invention relates to a semiconductor device including a gate electrode over a substrate, a gate insulating film over the gate electrode, a first source or drain electrode over the gate insulating film, an island-shaped semiconductor film over the first source or drain electrode, and a second source or drain electrode over the island-shaped semiconductor film and the first source or drain electrode. Further, the second source or drain electrode is in contact with the first source or drain electrode, and the island-shaped semiconductor film is sandwiched between the first source or drain electrode and the second source or drain electrode. Moreover, the present invention relates to a manufacturing method of the semiconductor device.
申请公布号 US7749825(B2) 申请公布日期 2010.07.06
申请号 US20060545223 申请日期 2006.10.10
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 HONDA TATSUYA
分类号 H01L21/84 主分类号 H01L21/84
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