FIELD EMISSION DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要
<p>PURPOSE: A field emission device and a manufacturing method thereof are provided to reduce manufacturing costs by removing a vacuum deposition process and an exposure process by forming a carbon nanotube emitter including the composite of Sn and a carbon nanotube on a metal electrode. CONSTITUTION: At least one groove is formed in a substrate(200). A metal electrode(210) is formed on the bottom surface of the groove. A carbon nanotube emitter is formed on the metal electrode. The carbon nanotube emitter comprises the composite of a carbon nanotube(235) and Sn. A carbon nanotube emitter(230') comprises an inter-metal compound layer formed on the metal electrode.</p>
申请公布号
KR20100076801(A)
申请公布日期
2010.07.06
申请号
KR20080134971
申请日期
2008.12.26
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SON, YOON CHUL;KIM, YONG CHUL;HAN, IN TAEK;KANG, HO SUK