| 摘要 |
<p>PURPOSE: A manufacturing method of a magnetic tunnel bonding device is provided to prevent the short between a free layer and a pinned layer by forming an insulative polymer layer on both sidewalls of a first pattern comprising a free layer. CONSTITUTION: A stacked layer is formed in which a pinning layer(22), a pinned layer(23), a tunnel insulating layer(24) and a free layer(25) are successively stacked. A hard mask pattern(26) is formed on the stacked layer. The stacked layer is etched to the free layer using the hard mask pattern as an etching barrier to form a first pattern(27). A insulative polymer layer(28) is formed on both sidewalls of the first pattern.</p> |
