发明名称 Methods for treating surfaces
摘要 Some embodiments include methods for treating surfaces. Beads and/or other insolubles may be dispersed within a liquid carrier to form a dispersion. A transfer layer may be formed across a surface. The dispersion may be directed toward the transfer layer, and the insolubles may impact the transfer layer. The impacting may generate force in the transfer layer, and such force may be transferred through the transfer layer to the surface. The surface may be a surface of a semiconductor substrate, and the force may be utilized to sweep contaminants from the semiconductor substrate surface. The transfer layer may be a liquid, and in some embodiments may be a cleaning solution.
申请公布号 US7749327(B2) 申请公布日期 2010.07.06
申请号 US20070933770 申请日期 2007.11.01
申请人 MICRON TECHNOLOGY, INC. 发明人 SINHA NISHANT;SANDHU GURTEJ S.
分类号 B08B3/00;B08B3/04 主分类号 B08B3/00
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