摘要 |
PURPOSE: A probe card for a multi-site test of a chip supporting JTAG is provided to enable a test of a semiconductor chip supporting multiple JTAG only with a set of driver channels related to JTAG. CONSTITUTION: A probe card needle contacts JTAG related pins of a plurality of semiconductor chips. An input line(51) shares input pins related to TMS, TCK, TRST, and TDI with a driver channel(41) related to JTAG of a tester(40). Connection lines(52a,52b) serially connect the input pins(61a,62a) related to TDI of semiconductor chips(62,63) to an output pins(61b,62b) related to TDO. |