Large area substrate etching apparatus having a preventing mean of precipitation and method for preventing precipitation,申请号KR20070081023-传众专利搜索

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发明名称	Large area substrate etching apparatus having a preventing mean of precipitation and method for preventing precipitation
摘要
申请公布号	KR100968192(B1)	申请公布日期	2010.07.05
申请号	KR20070081023	申请日期	2007.08.13
申请人		发明人
分类号	G02F1/13	主分类号	G02F1/13
代理机构		代理人
主权项
地址

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