| 摘要 |
PURPOSE: A method for manufacturing a silicon nitride heating element is provided to improve the heating performance by using a tungsten filament as a heat source. CONSTITUTION: A tungsten filament is formed by winding tungsten with a spiral shape(S100). A bisque is formed by compressing and molding raw materials and tungsten filament(S110). The bisque is sintered by a hot press(S120). The bisque is ground with a diamond grinding wheel(S130). A conductive line and an electrode are contacted with a silver-copper adhesive(S140). |
