发明名称 RESIST SOLUTION AND METHOD OF FORMING PATTERN USING THEREOF
摘要 PURPOSE: A resist solution and a pattern formation method using thereof are provided to reduce the drying time of the resist solution before transferring the resist solution to a printing plate after coating the resist solution to a blanket. CONSTITUTION: A resist solution contains a base polymer, a tackifier, a carrier solvent, a printing solvent, and a methoxysilane coupling agent including the weak affinity with the carrier solvent. The methoxysilane coupling agent is either n-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropylimethoxysilane, 3-acryloxypropyltrimethoxysilane, vinyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, p-styryltrimethoxysilane, or 3-methacryloxypropyltrimethoxysilane. The base polymer is either phenol, cresol, novolac, or PMMA(poly methyl methacrylate acrylate).
申请公布号 KR20100074857(A) 申请公布日期 2010.07.02
申请号 KR20080133400 申请日期 2008.12.24
申请人 LG DISPLAY CO., LTD. 发明人 KIM, BYUNG GEOL;KIM, JIN WUK;KIM, SUNG HEE
分类号 G03F7/032;G03F7/075 主分类号 G03F7/032
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