| 发明名称 |
SILICIDE THERMAL HEATERS FOR SILICON-ON-INSULATOR NANOPHOTONIC DEVICES |
| 摘要 |
A thermally switched Silicon-On-Insulator (SOT) photo electronic device includes a silicon layer including an optical waveguide and a suicide heating element horizontally adjacent to the waveguide. The waveguide has a refractive index that changes with heat applied to the waveguide.
|
| 申请公布号 |
KR20100075464(A) |
申请公布日期 |
2010.07.02 |
| 申请号 |
KR20107006938 |
申请日期 |
2008.09.02 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GREEN WILLIAM M.;HAMANN HENDRIK F.;VLASOV YURII A. |
| 分类号 |
G02B6/12;G02B6/35 |
主分类号 |
G02B6/12 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
