LIQUID-SCATTERING PREVENTION CUP, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR OPERATING THE APPARATUS

摘要

PURPOSE: A liquid-scattering prevention cup, a substrate processing apparatus, and a method for operating the apparatus are provided to prevent liquid scattering from a liquid anti-scattering cup by attaching PVA sponge to the inner side of the liquid anti-scattering cup. CONSTITUTION: A liquid anti-scattering cup(10) comprises a cup body(11) and an anti-scattering sheet. The anti-scattering sheet includes an entire region on inside of the cup body or a surface hydrophile matter layer. The anti-scattering sheet is attached to the cup body by an adhesive material to expose hydrophilic material layer to the outside.